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为获得用于表面应力测量的压阻悬臂梁传感器的参数的优化方法,建立了有限元分析模型。通过将模拟结果与压阻理论结合,分析了表面应力作用下的压阻式微型悬臂梁传感器。建立了两层硅悬臂梁结构模型,在顶层硅内施加初始应力模拟表面应力。对仿真结果应力数据进行提取与计算,结合压阻系数,分析了n型硅压阻与p型硅压阻长度、宽度和位置等对微型悬臂梁传感器灵敏度的影响。结果表明:为获得较高灵敏度,n型硅压阻应做长,p型硅压阻应做短并安排在固定端。该文研究结果为悬臂梁生化传感器提供了设计参考。
In order to obtain the optimization method of the parameters of the piezoresistive cantilever sensor used for surface stress measurement, a finite element analysis model is established. By combining the simulation results with the piezoresistive theory, piezoresistive miniature cantilever sensors with surface stress are analyzed. A two-layer silicon cantilever beam structure model was established, and initial stress was applied to simulate the surface stress in the top silicon layer. Based on the piezoresistive coefficients, the influence of n-type silicon piezoresistive and p-type silicon piezoresistive length, width and position on the sensitivity of miniature cantilever sensors were analyzed. The results show that for better sensitivity, the n-type silicon piezoresistive should be longer and the p-type piezoresistance should be short and arranged at the fixed end. The results of this paper provide a reference for design of cantilever biochemical sensors.