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为了减小加工误差对高频滤波器性能的影响,设计并加工了一款基于新型谐振柱的高频波导滤波器。首先设计了一个两腔波导滤波器,然后通过给腔内的方形脊两侧加载梯形凸台完成了滤波器的设计。运用Ansoft HFSS软件对滤波器进行了模型仿真和参数优化。仿真优化结果显示,滤波器中心频率为104 GHz,带宽约为3 GHz,插入损耗小于0.1 dB,回波损耗大于25 dB,且梯形凸台的加载有助于增强腔间耦合,将加工误差影响减小为原来的一半。最后用微电子机械系统(MEMS)工艺完成了滤波器的加工并对其进行了测试,测试结果与仿真结果大致吻合,为高频滤波器的设计和加工提供了参考。
In order to reduce the influence of machining error on the performance of high-frequency filter, a high-frequency waveguide filter based on the new resonant column is designed and fabricated. First, a two-cavity waveguide filter is designed, and then the filter design is completed by loading trapezoidal bosses on both sides of the square ridge in the cavity. Ansoft HFSS software was used to simulate the filter and parameter optimization. The simulation results show that the filter center frequency is 104 GHz, the bandwidth is about 3 GHz, the insertion loss is less than 0.1 dB, the return loss is greater than 25 dB, and the loading of trapezoidal bosses helps to enhance the coupling between cavities. Reduce to half of the original. Finally, the micro-electro-mechanical system (MEMS) process to complete the filter processing and testing it, the test results and simulation results are roughly consistent for the design and processing of high-frequency filter provides a reference.