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目前水射流切割平台在精密切割领域还存在一些问题,在精度和速度方面存在不足,而基于直线电机驱动的精密切割平台在切割半导体材料上,因其高速度和高精度而具有很大的潜力,相对于传统的“旋转伺服电机+滚珠丝杠”进给传动有着巨大的优势。综合分析水射流切割平台性能参数及要求,提出一套可行的直线电机选型方案,实现了直线电机在水射流精密切割数控机床上的可靠应用。
At present, waterjet cutting platforms have some problems in the field of precision cutting, which have shortcomings in terms of accuracy and speed. However, the precision cutting platform based on linear motor drives has great potential in cutting semiconductor materials due to its high speed and high precision Compared to the traditional “rotary servo motor + ball screw ” feed drive has a huge advantage. Based on the comprehensive analysis of the performance parameters and requirements of water jet cutting platform, a set of feasible linear motor selection scheme is put forward to realize the reliable application of the linear motor on the water jet precision cutting CNC machine tool.