近几年来,由于电化学家和固体物理学家的结合,电化学与半导体技术和理论的相互渗透,提出了一类能够敏感离子或分子的半导体器件,称为化学敏感半导体器件。这类器件的出现不仅影响着电分析化学、医学和生物学等学科,而且对固体物理学的研究也具有重要意义。随着近十多年来离子选择性电极(或称化学敏感选择性电极)技术的发展,Bergveld首先提出了一个化学敏感半导体器件,他称之为离子敏感场效应管(Ion Sensistive Field Effect Transistor,简称ISFET)。Bergveld用普通的金属-氧化物-半导体场效应管(MOSFET), In recent years, due to the combination of electrochemical chemists and solid state physicists, the mutual penetration of electrochemical and semiconductor technologies and theories, a type of semiconductor device capable of sensing ions or molecules has been proposed, which is called a chemical-sensitive semiconductor device. The emergence of these devices not only affect the electrical analysis chemistry, medicine and biology and other disciplines, but also the study of solid state physics is also of great significance. With the development of ion selective electrode (or chemosensitive selective electrode) technology for more than a decade, Bergveld first proposed a chemically sensitive semiconductor device, which he called Ion Sensistive Field Effect Transistor ISFET). Bergveld uses common metal-oxide-semiconductor field-effect transistors (MOSFETs)