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针对电化学湿法刻蚀硅微加工需求,基于LabVIEW软件开发平台,利用上位机、可编程直流稳压电源PSM-6003、低温控制和LED光辐照等设备搭建了一种新型可编程电化学湿法刻蚀装置。其中基于LabVIEW的PSM-6003上位机控制软件,可以通过图形界面对系统各种参数实时设置,例如刻蚀电压幅值、刻蚀脉冲频率和占空比、刻蚀电流和刻蚀时间以及刻蚀系统的辅助光照和环境温度等,系统各参数监控和动作执行主要利用美国NI公司PCI-6221数据卡实现。该系统成本低、操作简便、可模块化安装,对促进实验室电化学湿法刻蚀微加工设备的研制有重要借鉴意义。
Aiming at the demand of electrochemically wet etching silicon micromachining, based on the LabVIEW software development platform, a new type of programmable electrochemical device was set up by using PC, programmable DC power supply PSM-6003, low temperature control and LED light irradiation, Wet etching device. Among them, PSM-6003 PC-based control software based on LabVIEW can set various parameters of the system in real time through a graphical interface such as etching voltage amplitude, etching pulse frequency and duty cycle, etching current and etching time, and etching System auxiliary lighting and ambient temperature, the system parameters of the monitoring and action of the implementation of the main use of the United States NI PCI-6221 data card to achieve. The system has the advantages of low cost, easy operation and modular installation, which is of great reference significance for the development of laboratory electrochemical wet etching micro-processing equipment.