论文部分内容阅读
氦泄漏检测的真实极限,是由质谱检漏仪对氦的最高灵敏度所决定的,可以认为是10~(-10)大气压毫升/秒。这种检漏仪的输出,受质谱管处所形成的真空度之影响很强。本文所提出的方法,可使漏泄测量容许范围比质谱检漏仪的真实测量极限还要延伸10~(-5)倍。方法的根据是,将发生在整个同时的漏泄之累积与背景累积相比较。本文叙述了相当复杂的操作技巧,并认为这样谈法易于使读者熟悉这门技术。
The true limit of helium leak detection is determined by the highest sensitivity of the mass spectrometer leak detector to helium and can be assumed to be 10 to 10 atmospheres milliliters per second. The output of this leak detector is strongly affected by the degree of vacuum created at the mass spectrometer tube. The method proposed in this paper can extend the allowable range of leakage measurement by 10 ~ (-5) times than the real measurement limit of mass spectrometer leak detector. The rationale for the method is that the accumulation of leaks that occur throughout the same time is compared with the background accumulation. This article describes a fairly complex set of manipulative techniques and considers this approach easy to familiarize readers with this technique.