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探讨根据测量的总积分散射定标得到表面均方根粗糙度的问题。利用基片的表面模型和积分球本身的结构特征，对测量的表面有效均方根粗糙度进行修正，得到的表面均方根粗糙度与进口表面测量仪测量得的值相差为０．１ｎｍ 左右。
The problem of root mean square roughness of a surface is scaled and scaled according to the measured total integral scattering. Using the surface model of the substrate and the structural characteristics of the integrating sphere itself, the effective root mean square roughness of the measured surface is corrected. The difference between the measured root mean square roughness and the measured value of the imported surface measuring instrument is about 0.1 nm .