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用Spearman相关度分析法研究了3环带纯相位光瞳滤波器的加工质量与超分辨性能之间的显著度关系,并比较了不同环带光瞳滤波器的偏心对超分辨性能的影响.结果表明,环带的偏心与光斑半径、Strehl比的相关度系数均大于0.8,倒圆可使一级旁瓣强度的变化率高达29.04%,因此环带偏心和倒圆是决定元件性能的有效表面质量参量;外层环带偏心对超分辨性能的影响大于内层环带,需要更加严格的公差控制.该方法为微光学元件设计加工中的准确度控制提供了理论依据及可行的技术途径.
Spearman correlation analysis method was used to study the saliency relationship between the processing quality and super-resolution performance of the 3-band pure phase pupil filter. The effects of different annular pupil filter eccentricity on the super-resolution performance were also compared. The results show that the coefficient of correlation between the eccentricity of the annular zone and the spot radius and Strehl ratio is greater than 0.8, and the rounding can make the rate of change of the primary side lobe as high as 29.04%. Therefore, eccentricity and rounding of the annular zone are effective for determining the component performance Surface quality parameters; the influence of the outer ring eccentricity on the super-resolution performance is greater than the inner annular zone, requiring more stringent tolerance control.This method provides a theoretical basis and feasible technical approach for the accuracy control of micro-optical components design and processing .