研究了超高斯相位型光瞳滤波器的轴向超分辨性能。通过数值模拟,使用新的参数T,w讨论确定了三区二元相位型光瞳滤波器的超分辨区域。将超高斯相位型与二元相位型滤波器对比,分析相同参数下两种光瞳滤波器的轴向超分辨能力,进而讨论超高斯相位型滤波器的轴向超分辨性能随其阶数的变化关系。超高斯型滤波器与相位型相比,超分辨能力略有降低,但其旁瓣能量也有所降低,因此能量利用率有所提高。 The axial super-resolution performance of the super-Gaussian phase-type pupil filter is studied. By numerical simulation, we use the new parameters T, W to discuss the super resolution region of the three-zone binary phase-type pupil filter. By comparing the super-Gaussian phase with the binary phase filter, the axial super-resolving power of the two kinds of pupil filters under the same parameters is analyzed. Then the axial super-resolution performance of the super-Gaussian phase filter is discussed. alternative relation. Compared with the phase type, the super-Gaussian filter slightly reduces the super-resolving power, but its side lobe energy also decreases, so the energy utilization rate is improved.