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用多弧离子镀膜技术结合热扩散成功制备了高硅钢材料。研究了在不同扩散温度下合金的结构、形貌以及硅扩散深度。X射线衍射(XRD)测试表明,在经过高温热处理后样品表层均为α-Fe体心立方结构。硅扩散依赖于表层Fe3Si的结构的形成,场发射扫描电镜结合X射线能谱(FE-SEM,EDS)检测显示:在经过1200℃真空热处理后样品断面硅质量分数从4.6%至5.1%不等,而显微硬度HV测试值为2800 MPa,进一步印证了能谱测试的准确性。
Multi-arc ion plating technology combined with thermal diffusion successfully prepared high-silicon steel. The structure, morphology and depth of diffusion of silicon at different diffusion temperatures were investigated. X-ray diffraction (XRD) tests showed that the samples were all α-Fe body-centered cubic structure after high temperature heat treatment. The diffusion of silicon depends on the formation of the surface Fe3Si structure. The field emission scanning electron microscopy and energy dispersive X-ray spectroscopy (FE-SEM, EDS) showed that the silicon mass fraction of the cross section of the sample ranged from 4.6% to 5.1% after vacuum heat treatment at 1200 ℃ , While the micro hardness HV test value of 2800 MPa, further confirms the accuracy of the energy spectrum test.