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本文用一维扩散模型推出了热电探测器响应率的表达式,并计算了悬空的和有底板的TGS热电探测器的响应率和NEP的数值(作为器件厚度和工作频率的函数)。根据数值计算的结果,分析了薄膜热电探测器的发展前景。本文认为: (i)必须用薄膜底板。底板和热电晶体的厚度最好都在0.1微米以下。底板宜选用比热和密度尽量小的材料。这样的薄膜器件,其低频NEP可能比10微米厚的悬空器件降低一个数量级。 (ii)如底板厚度超过热扩散长度,薄膜器件响应率便下降,同时温度噪声上升,NEP上升。这样的薄膜器件,其低频性能将显著地不如10微米厚的悬空器件。
In this paper, the expression of response rate of pyroelectric detector is deduced by one-dimensional diffusion model, and the response and NEP (as a function of device thickness and operating frequency) of the suspended and underplate TGS pyroelectric detector are calculated. According to the numerical results, the development prospects of the thin film pyroelectric detector are analyzed. This paper argues: (i) Thin film substrates must be used. The thickness of the backplane and the thermoelectric crystals are preferably below 0.1 micrometer. Floor should use specific heat and density of materials as small as possible. Such thin-film devices, the low-frequency NEP may be 10 microns thick than the dangling devices by an order of magnitude. (ii) If the thickness of the backplane exceeds the thermal diffusion length, the responsivity of the thin-film device will decrease and the temperature noise will increase and NEP will rise. Such a thin film device, its low-frequency performance will be significantly less than 10 microns thick dangling devices.