对未来微细光刻技术的预测是微细加工技术发展必然要考虑的问题,不过,在这方面仍有许多争论的余地。预测未来的光刻技术及其光刻装置来制定业务计划,这是一项极其大胆的工作。本文根据现状分析和有关我们在实际开发中的技术,大胆地提出问题,试述了今后三年的前景和从1980年后半年到90年代的整个期间内将 The prediction of the future fine lithography technology is an inevitable issue to be considered in the development of microfabrication technology. However, there is still much room for controversy in this respect. It is an extremely daring task to predict the future of lithography and its lithography equipment to create a business plan. Based on the analysis of the status quo and the technology we are actually developing, the paper boldly raises questions and discusses the prospects for the next three years and the prospects for the entire period from the latter half of 1980 to the 1990s