论文部分内容阅读
大电流电子源是高功率氩离子激光器、离子镀膜装置、真空冶炼设备等的关键部件。目前多数是采用热阴极,现在介绍一种水冷杯状空腔电弧阴极。 设计空腔电弧阴极主要考虑:散热、绝缘、防止烧蚀、消除污染、限制弧斑运动、稳定电弧、启动电弧等因素。 本文设计的阴极如图1所示。图中1是水冷杯状金属空腔,其内壁面是阴极的发射面。在阴极出口孔内,装有自加热衬套2,用它来把阴极斑约束在空腔内。3是绝缘垫。
High-current electron source is a high-power argon ion laser, ion plating equipment, vacuum smelting equipment, and other key components. Most current use of hot cathode, now introduces a water-cooled cup-shaped cavity arc cathode. Design cavity arc cathode main consideration: heat, insulation, to prevent ablation, eliminate pollution, limiting the arc spot movement, stable arc, start the arc and other factors. This design of the cathode shown in Figure 1. 1 is a water-cooled cup-shaped metal cavity, the inner wall surface is the cathode emission surface. In the cathode outlet port, a self-heating bushing 2 is provided for confining the cathode spot within the cavity. 3 is the insulation pad.