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随着工业技术的发展,对低成本、高可靠、能连续监视气体和蒸汽浓度的各种应用日益增多,如有毒气体的测定、室内空气质量的控制、食品和医学诊断、化学处理中的质量控制等等,作为这些控制系统核心的气体传感器,近几年来也有了新的发展。本文将综述几种气体传感器的工作原理及其结构,特别对近几年发展较快的声表面波气体传感器将作较详细的介绍。
With the development of industrial technology, there are increasing applications for low cost, high reliability, and continuous monitoring of gas and vapor concentrations such as toxic gas, indoor air quality control, food and medical diagnostics, quality in chemical processes Control, etc. Gas sensors, which are at the heart of these control systems, have also seen new developments in recent years. This article will review the working principle of several gas sensors and their structure, especially for the more rapid development of surface acoustic wave gas sensors in recent years will be described in more detail.