本工作对北京前门器件厂3DG41系列的电视视放输出管进行了低温钝化(以下简称LTP)。结果证明,P—Al玻璃LTP工艺对提高小电流h_(FE)很有效。实践中体会到,这项新工艺的技术关键是:一、严格控制硅表面腐蚀层的深度,二、控制好蒸铝厚度,三、合适的铝膜氧化温度。 This work on the front door device factory in Beijing 3DG41 series of TV viewing tube output of low-passivation passivation (hereinafter referred to as LTP). The results show that P-Al glass LTP process to improve the current h_ (FE) is very effective. Experience in practice, the key technology of this new technology is: First, the depth of silicon surface etching layer is strictly controlled, and second, control the thickness of the aluminum, the third, the appropriate aluminum oxide temperature.