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研究了直接电感耦合等离子质谱（ＩＣＰＭＳ）测定９９．９９９％纯度氧化钇中稀土杂质的方法，详细探讨了仪器工作参数对稀土元素测定的影响，对各种干扰现象进行了研究，并提出定量校正方法。实验表明，加入内标元素可有效地克服基体效应、接口效应和仪器工作参数漂移的影响。方法的检出限为０。００３～００２ｎｇ／ｍｌ，变异系数（ＣＶ％）为０．２％～５．４％，回收率为９０％～１１５％。适合９９．０％～９９．９９９％纯度氧化钇中稀土杂质的测定，分析结果与等离子体发射光谱（ＩＣＰ－ＡＥＳ）和火花源质谱（ＳＳＭＳ）法一致．
The method of direct inductively coupled plasma mass spectrometry (ICPMS) for the determination of rare earth impurities in 99.999% purity yttrium oxide was studied. The influence of instrument operating parameters on the determination of rare earth elements was discussed in detail. Various disturbing phenomena were studied and quantitative correction method. Experiments show that the addition of internal standard elements can effectively overcome the matrix effect, the interface effect and instrument drift of the working parameters. The detection limit of the method was 0.003 ~ 002ng / ml, the CV% was 0.2% ~ 5.4% and the recovery was 90% ~ 115%. It is suitable for the determination of rare earth impurities in 99.0% -99.999% purity yttrium oxide. The results are in good agreement with those of plasma-atomic emission spectrometry (ICP-AES) and spark mass spectrometry (SSMS).