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激光干涉仪对被测件的长度测量,是以反射镜的位移量确定,其位移量的计算公式为L_(20)=N·λ_o/2Kn-[1+a(20-t)](1)式中,L_(20)—折算为20℃时位移量的值(微米); N—干涉条纹数; λ_0—激光在真空中的波长(微米),当激光器选定时
Laser interferometer to measure the length of the measured piece, is the displacement of the mirror to determine the amount of displacement of the formula for the L_ (20) = N · λ_o / 2Kn- [1 + a (20-t)] (1 ) Where L_ (20) - is the value of displacement (in microns) at 20 ° C; N - the number of fringes; λ_0 - the wavelength of the laser in the vacuum (microns)