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以(CH3)2Si(OC2H5)2为前驱体,采用溶胶凝胶与有机合成相结合的方法,制得稳定性良好的涂膜液。采用旋转涂膜法在掺钕磷酸盐激光玻璃棒端面涂制防潮膜,膜层固化后透过率达96.5%,获得的膜层表面粗糙度优良,均方根表面粗糙度(RMS)为1.659 nm,平均粗糙度(RA)平均为1.321 nm;在激光波长1053 nm,脉冲宽度1 ns条件下膜层的激光破坏阈值可达10~14 J/cm2。经过“神光Ⅱ”高功率激光器物理实验运行,膜层使用期为五年,并且已经在我国“神光Ⅲ”原型装置上试用。
To (CH3) 2Si (OC2H5) 2 as precursor, using a combination of sol-gel and organic synthesis methods, to obtain a good stability of the coating solution. Moisture-proof film was coated on the end surface of Nd-doped phosphate laser glass rod by spin-coating method. The film had a transmittance of 96.5% after curing. The surface roughness of the obtained film was excellent. The root mean square surface roughness (RMS) was 1.659 nm and the average roughness (RA) is 1.321 nm. Under laser wavelength of 1053 nm and pulse width of 1 ns, the laser damage threshold of the film can reach 10 ~ 14 J / cm2. After the “SG” Ⅱ high-power laser physics experiments run, the membrane life of five years, and has been in China’s “Shenuang III” prototype device on the trial.