自从1977年以来,半导体的激光表面处理是国际上很活跃的研究领域。据不完全统计,截止1981年7月,发表的论文数在800篇以上,近几年继续发表了大量论文,并出版了若干专著。从1978年至今,每年11月在美国波士顿召开的材料研究学会(MRS)年会上都有半导体的激光表面处理方面的专题报告会,并且每次都出版这方面的会议集。另外,离子束 Since 1977, semiconductor laser surface treatment is an internationally active research area. According to incomplete statistics, as of July 1981, there were over 800 papers published, a large number of papers have been published in recent years, and a number of monographs have been published. From 1978 to the present, every November, at the annual meeting of the Society of Materials Research (MRS) in Boston, USA, there has been a symposium on laser surface treatment of semiconductors, and each time a conference is published in this area. In addition, ion beam