本文叙述了LZ-50离子注入装置及其在材料表面改性中的应用。该装置离子能量80keV,氮离子束流强～10mA,注入面积～200cm~2,性能稳定,重复性好,可长期稳态运行。利用该装置对硬质合金、工具钢、钛合金、陶瓷及其它有色金属材料进行了氮离子注入实验,并取得了一些有应用价值的工艺结果,如离子注入使Co-WC机械夹固刀片的耐磨性能提高2—4倍。 This article describes the LZ-50 ion implantation device and its application in the surface modification of materials. The device ion energy 80keV, nitrogen ion beam intensity ~ 10mA, injection area ~ 200cm ~ 2, stable performance, good repeatability, long-term steady-state operation. Nitride ion implantation experiments were carried out on the cemented carbide, tool steel, titanium alloy, ceramic and other non-ferrous metal materials by using the device, and some valuable results were obtained. For example, the ion implantation enables the Co-WC to mechanically clamp the blade 2-4 times higher wear resistance.