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通过对微机械陀螺的调研分析,提出了一种新型微机械陀螺仪,并对陀螺进行了结构设计。该结构采用静电梳齿驱动、栅结构电容检测,使陀螺具有较高灵敏度。驱动模态和检测模态均为滑膜阻尼,能够实现较高的Q值,且具有一定的解耦特性。文中通过仿真分析得到了结构的各阶频率,使陀螺驱动模态和检测模态固有频率匹配,验证了结构的合理性。结合现有加工工艺水平进行了加工,并验证了其高灵敏度特性。
Through the investigation and analysis of the micromechanical gyroscope, a new type of micromechanical gyroscope is proposed, and the structure of the gyroscope is designed. The structure of the electrostatic comb drive, gate structure capacitance detection, the gyro with high sensitivity. Both the driving mode and the detecting mode are synovial damping, which can achieve higher Q value and have certain decoupling characteristics. In this paper, the structure of the order of the frequencies obtained by simulation analysis, the gyro-driven mode and detection mode natural frequency matching verify the rationality of the structure. Combined with the existing level of processing technology was processed and verified its high sensitivity characteristics.