一种新颖微机械数模转换器的模拟与设计优化

来源 :半导体学报 | 被引量 : 0次 | 上传用户：zhaoleiBCB

【摘要】

：

提出了一种基于权间隙原理的微机械数模转换器(WGDAC),它与电路中的权电阻数模转换器的原理类似,利用间隙的长度作为比例因子,从而实现由二进制电压输入到模拟位移输出的转换

【作者】

：

刘清惓黄庆安

【机构】

：

东南大学微电子中心

【出处】

：

半导体学报

【发表日期】

：

2004年期

【关键词】

：

数模转换器微电子机械系统微执行器精确定位有限元分析

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提出了一种基于权间隙原理的微机械数模转换器(WGDAC),它与电路中的权电阻数模转换器的原理类似,利用间隙的长度作为比例因子,从而实现由二进制电压输入到模拟位移输出的转换.给出了有限元方法分析对由热执行器阵列驱动的数模转换器的输出位移分析的结果.为了减小误差,对结构作了优化设计,使误差不大于0.002μm.

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一种新颖微机械数模转换器的模拟与设计优化

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