用离子束研磨工艺制备了薄达4微米的可自身支持的热电材料片。用这些极薄的片子制备了1毫米~2的钽酸锂探测器,其归一化探测率D~*经测量为8.5×10~8厘米。赫~(1/2)。瓦~(-1)(30赫)。用这种工艺有可能做出的探测器D~*大大超过10~9厘米·赫~(1/2)·瓦~(-1)。此外,离子束磨片还具有清洁、表面无损伤的优点,且可获得几何结构复杂的探测器片子。 A self-supporting thermoelectric material sheet as thin as 4 μm was prepared by the ion beam milling process. Using these very thin films, a lithium niobate detector of 1 mm 2 was fabricated. The normalized detection rate D * was measured to be 8.5 × 10 -8 cm. He ~ (1/2). Watts ~ (-1) (30 Hz). With this process it is possible to make the detector D ~ * greatly exceed 10 ~ 9 cm · He ~ (1/2) · W -1. In addition, the ion beam mill also has the advantages of clean, non-destructive surface, and the geometry of the detector can be obtained films.