直线电动机和扭矩电动机在半导体和电子工业中已经得到了广泛的应用 ,在机床行业的应用近年来也在不断增长。直接驱动系统拥有低摩擦、维护简单和高效率等优点。但是 ,直接驱动的高效率只有在控制系统、电动机、机械部分与测量系统相互之间完美配合时才能得到充分发挥。直接驱 Linear motors and torque motors have found widespread use in the semiconductor and electronics industries and their use in the machine tool industry has also been increasing in recent years. Direct drive system has the advantages of low friction, easy maintenance and high efficiency. However, the high efficiency of direct drive can only be fully realized when the control system, the motor, the mechanical part and the measuring system are perfectly matched with each other. Direct drive