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表面起伏靶是惯性约束聚变（ＩＣＦ）分解实验中的重要实验用靶。本文报导了采用离子束刻蚀和激光干涉两种方法制备初始微扰振幅和波长分别在几微米和几十微米范围的正弦调制形状；摸索了相应的工艺条件和工艺过程；用台阶仪及光学显微轮廓仪测微加工后的形貌；探讨了调制波长的精确控制与干涉工艺之间的关系。
Surface undulation targets are important experimental targets in the experiment of inertial confinement fusion (ICF) decomposition. In this paper, ion beam etching and laser interference are used to prepare sinusoidal modulation shapes with initial amplitudes of perturbation and wavelengths in the range of several micrometers and tens of micrometers respectively. Corresponding process conditions and processes are explored. The micro profiler was used to measure the morphology after micro-machining. The relationship between the precise control of the modulation wavelength and the interference process was discussed.