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X射线组合折射透镜(CRL)已逐步成为同步辐射光源下X射线聚焦光学器件的标准配件之一,它具有结构紧凑、易调节校准、适用光子能量范围大等优点.本文设计了一种级联式平面抛物面型CRL,它将N1个具有较大抛物面几何孔径(R0)的折射单元I与N2个具有较小抛物面顶点曲率半径(R)的折射单元II级联,以解决常规CRL设计过程中焦斑尺寸与透过率的矛盾.采用PMMA材料,利用LIGA技术制作了一组级联式平面抛物面型CRL,其中折射单元I的主要结构参数为N1=15,R1=200μm,2R01=564μm;折射单元II的主要结构参数为N2=20,R2=50μm,2R02=140μm.在上海光源同步辐射线束上,所制作的级联式平面抛物面型CRL实现了对初始光斑尺寸为200μm×100μm的入射X射线的一维聚焦,测试得到的焦距为1.052 m,横向焦斑尺寸为24.9μm@8 keV,透过率为2.19%.
X-ray combined refractive lens (CRL) has gradually become one of the standard accessories of X-ray focusing optics under synchrotron radiation light source, which has the advantages of compact structure, easy adjustment and adjustment, large photonic energy range, etc. This paper presents a cascade Type planar parabolic CRL that cascading N1 refractive elements I with a larger parabolic geometric aperture (R0) with N2 refractive elements II with a smaller radius of curvature (R) of the apex of the parabola in order to solve the problems associated with the conventional CRL design process A series of cascaded planar parabolic CRLs were fabricated by PMMA using LIGA technique. The main structural parameters of Refractive Element I were N1 = 15, R1 = 200μm and 2R01 = 564μm. The main structural parameters of Refraction Unit II are N2 = 20, R2 = 50μm and 2R02 = 140μm. The tandem planar paraboloid CRL fabricated on Shanghai source synchronous radiation beam achieves the effect of incident light with an initial spot size of 200μm × 100μm X-ray one-dimensional focusing, the test has a focal length of 1.052 m, horizontal focal spot size of 24.9μm@8 keV, transmittance of 2.19%.