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近年来,PZT铁电薄膜因其良好的电、光、热电和超声等方面性能引起了研究工作者的广泛关注.大量研究表明,膜中钙钛矿相含量越多,铁电性越好,理想的PZT铁电薄膜应该具有纯钙钛矿结构.但在膜制备过程中,常有非铁电相出现,它们的形成及向铁电相的转变程度与制备条件紧密相关.所以,研究膜中非铁电相向铁电相的转变过程,进而寻找改善膜铁电性的最佳途径是很重要的.Iijima和Wang等指出,膜的晶相结构对衬底温度非常敏感,铁电性能通过退火得到改善.另有文献报道膜中的铅含量和衬底材料的不同也能影响膜的微结构.本文描述了膜从非铁电的非晶或焦绿石相向铁电的钙钛矿相的转变过程,以及制备条件对相转变的影响,并讨论了可能的影响机制.
In recent years, PZT ferroelectric thin film has attracted wide attention of researchers due to its good performance in electricity, light, thermoelectricity and ultrasound.Numerous studies have shown that the more the perovskite phase content in the film, the better the ferroelectricity, The ideal PZT ferroelectric thin film should have a pure perovskite structure, but in the film preparation process, often non-ferroelectric phase occurs, their formation and the transition to the ferroelectric phase is closely related with the preparation conditions.Therefore, the research film It is very important to find the best way to improve the ferroelectricity of the ferroelectric film.Iijima and Wang et al have pointed out that the crystalline phase structure of the film is very sensitive to the substrate temperature and the ferroelectric properties Annealing was improved.Also reported in the literature of the lead content in the film and the different substrate materials can also affect the microstructure of the film.This paper describes the film from non ferroelectric amorphous or pyrochlore phase to ferroelectric perovskite phase transition Process, and preparation conditions on the impact of phase transition, and discussed the possible mechanisms of influence.