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探讨了在Ｏ２＋Ｂｒ２＋Ａｒ气氛中，耐热纲表面化学气相沉积碳化钛薄膜的高温腐蚀行为与碳化钛的组织形态、腐蚀温度、气氛中的氧分压和漠分压的关系。发现高温腐蚀主要是碳化钛薄膜和基体中铁的氧化，在沉积温度和碳／钛比高时获得的致密的ＴｉＣ组织，更抗高温氧化。还发现氧化速率与腐蚀温度、气氛中的氧分压和滇分压的增高而增大，特别是气氛中的溴，少量添加即可明显增大氧化速率，澳通常起催化作用。
The relationship between the high temperature corrosion behavior of TiC thin films and the morphology, corrosion temperature, partial pressure of oxygen and oxygen in the atmosphere were investigated in the atmosphere of O2 + Br2 + Ar. It is found that the high temperature corrosion is mainly the oxidation of iron in the titanium carbide film and the matrix, and the dense TiC structure obtained at the deposition temperature and carbon / titanium ratio is more resistant to high temperature oxidation. Also found that the oxidation rate and corrosion temperature, the oxygen partial pressure in the atmosphere and the increase of partial pressure of Yunnan increased, especially the bromine in the atmosphere, a small amount of addition can significantly increase the oxidation rate, Australia usually play a catalytic role.