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设计了一种新型接触式电容微加速度传感器。针对传感器结构,建立了考虑接触效应的周边固支圆形膜片在载荷作用下与基底“接触”前后的简化分析模型,并给出了接触半径的计算公式。为接触式传感器的研制奠定了理论基础。
A new type of contact capacitance micro-accelerometer is designed. Aiming at the structure of the sensor, a simplified analytical model of the surrounding fixed circular diaphragm considering the contact effect before and after the “contact” with the substrate under load is established and the formula for calculating the contact radius is given. For the development of contact sensor has laid a theoretical foundation.