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多晶硅材料是太阳能电池组件中光电转换的重要材料,1955年,德国西门子开发出以H2与高纯Si HCl3,在加热到1100℃的硅芯上沉积多晶硅的生产工艺;1957年,这种多晶硅生产工艺开始应用于工业化生产,被外界称为“西门子法”。改良西门子法是在传统的西门子工艺的基础上,同时具备节能、降耗、回收利用生产过程中伴随产生的大量H2、HCI、Si CI4等副产物以及大量副产热能的配套工艺。目前世界上绝大部分厂家均采用改良西门子法生产多晶硅。
Polysilicon material is an important material for photoelectric conversion in solar cell modules. In 1955, Siemens of Germany developed a production process of depositing polycrystalline silicon on a silicon core heated to 1100 ° C with H2 and high purity Si HCl3. In 1957, this polysilicon production Process began to be used in industrial production, the outside world is called “Siemens method ”. The improved Siemens method is based on the traditional Siemens process, and at the same time, it has the necessary processes of energy saving, reduction of consumption, recycling of a large amount of by-products such as H2, HCI and Si CI4 produced in the production process and a large amount of byproduct heat energy. At present, most manufacturers in the world adopt the modified Siemens method to produce polysilicon.