一、引言振梁式加速度计(VBA)的基本原理是用力-敏振动石英梁作为基本敏感元件.实际上,这种方法可制成具有内在数字输出的固态加速度计,该传感器对每个加速敏感电路在降低成本、提高性能价格比上有很好的潜力.二、振梁式谐振器在用石英晶体制成的加速度计应用中,加速度计使用一根梁状弯曲模式谐振器结构.应力梁的性能与一根绷紧的弦相 I. INTRODUCTION The basic principle of a vibrating-beam accelerometer (VBA) is to use a force-sensitive vibrating quartz beam as the basic sensing element. In practice, this method makes a solid-state accelerometer with an inherent digital output that accelerates each acceleration Sensitive circuit in reducing costs and improve cost performance have a good potential. Second, the vibrating beam resonator In the accelerometer made of quartz crystal applications, the accelerometer uses a beam bending mode resonator structure. Beam performance and a taut string phase