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提出了一种干涉相位差与检偏器方位角成线性关系的新型微分干涉显微镜,利用相移干涉技术,可定量测量样品的表面形貌及粗糙度参数,系统的垂直和横向分辨率分别为1nm和0.5μm。
A new type of differential interference microscope with a linear relationship between the phase difference and the azimuth angle of the analyzer is proposed. By using phase-shift interferometry, the surface morphology and roughness parameters of the sample can be quantitatively measured. The vertical and horizontal resolution of the system are 1 nm and 0.5 μm.