研制成测量材料光学特性的红外椭圆偏振光谱仪，其测量波长范围为２．５～１２．５μｍ，入射角度在２０°～９０°连续可变．系统数据采集、前放自动增益控制、入射角度和波长设置及扫描均由计算机自动控制．给出了金反射率和ＧａＡｓ体材料折射率椭偏测量，并与其它方法进行了对比，并分析了实验测量技巧和主要实验误差 Developed into the measurement of optical properties of materials, infrared spectroscopic ellipsometer, the measurement wavelength range of 2.5 ~ 12.5μm, the incident angle of 20 ° ~ 90 ° continuously variable. System data acquisition, pre-release automatic gain control, angle of incidence and wavelength settings and scanning are automatically controlled by the computer. The gold reflectivity and refractive index ellipsometry of GaAs materials are given and compared with other methods. The experimental measurement techniques and the main experimental errors are analyzed