当低压气体放电所生成的等离子体作用于固体表面时,固体表面将与等离子体中的活性原子和离子起反应,进而使表面状态发生变化。虽然人们对这一现象早已有所认识,但是直到最近,把它作为一种改善各种材料表面质量的新方法以后,才引起了广泛的重视。当前,各个方面都积极地对这一新的方法开展了进一步的研究工作。这一方法已开始应用到集成电路制造工艺、提高金属材 When the plasma generated by the low pressure gas discharge acts on the solid surface, the solid surface will react with the active atoms and ions in the plasma to change the surface state. Although this phenomenon has long been recognized, it has not been widely appreciated until recently as a new method of improving the surface quality of various materials. At present, all aspects of this new method are actively carried out further research work. This method has been applied to integrated circuit manufacturing processes to improve the metal material