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用动态原位电镜观察方法研究了直流溅射Fe_(82)Si_(6)B_(12)非晶合金膜的晶化动力学过程结果表明:溅射Fe_(82)Si_6B_(12)非晶合金膜的晶化类型为初晶晶化,初晶产物为α(Fe,Si)长大以枝晶方式进行,长大方向沿<110>晶向.α(Fe,Si)初晶形核采取瞬态均匀形核,晶核初始的形状为圆形和多角形,并很快发展成枝晶.α(Fe,Si)枝晶的长大是由B原子在非晶合金中的长程扩散控制的,根据对长大过程的动力学分析,得到了B原子在溅射Fe_(82)Si_(6)B_(12)非晶合金膜中的自扩散系数,且扩散系数与退火温度之间符合Arrhenius关系.
The dynamic in-situ electron microscopy was used to study the crystallization kinetics of the Fe_ (82) Si_ (6) B_ (12) amorphous alloy films deposited by DC sputtering. The results show that the crystallization kinetics of the sputtered Fe_ (82) Si_6B_ (12) The crystallization type of the film is primary crystallization, and the primary crystallization product is α (Fe, Si) grows by dendrite growth along the <110> orientation. Α (Fe, Si) State nucleation, the initial shape of the nucleus is circular and polygonal, and quickly developed into dendrites.The growth of α (Fe, Si) dendrites is controlled by the long-range diffusion of B atoms in amorphous alloys The self-diffusion coefficient of B atom in the sputtered Fe_ (82) Si_ (6) B_ (12) amorphous alloy film was obtained according to the kinetic analysis of the growth process. The diffusion coefficient and the annealing temperature accord with Arrhenius relationship.