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主要讨论了亚微米半导体器件模拟的流体动力学模型方程的建立过程．流体动力学模型由玻尔兹曼传输模型方程的矩推导而来， 对玻尔兹曼传输模型采用不同的物理假设和数学近似， 可以得到不同形式的流体动力学模型．同时， 对各种不同形式的流体动力学模型的相互转换关系进行了系统分析， 给出了半导体器件各种输运模型的适用范围等特性， 为通用亚微米半导体器件模拟软件的模型选择提供了参考依据．
The establishment process of hydrodynamic model equations simulated by submicron semiconductor devices is mainly discussed. The hydrodynamic model is derived from the moment of the Boltzmann transport model equation. Different physical assumptions and mathematical approximations are used for the Boltzmann transport model, and different forms of hydrodynamic models can be obtained. At the same time, a systematic analysis of the mutual conversion relationship among various forms of hydrodynamic model is given, and the applicable range and other characteristics of various transport models of semiconductor devices are given out, which provides the model selection for universal submicron semiconductor device simulation software Reference.