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对非晶态Fe-Cr-Al/Si薄膜研究了方块电阻与灵敏度、电阻温度系数、电阻率以及薄膜厚度等的关系;根据升温时薄膜电阻开始剧变推算了薄膜的晶化温度,并评估了Fe-Cr-Al/Si薄膜作为力传感器敏感材料的品质。
The relationship between the sheet resistance and the sensitivity, the temperature coefficient of resistance, the resistivity and the film thickness were investigated for the amorphous Fe-Cr-Al / Si films. The crystallization temperature of the films was calculated according to the fact that the sheet resistance started to change sharply at the time of temperature rise. Fe-Cr-Al / Si film as a force sensor-sensitive material quality.