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随着微型机电系统(MEMS)的快速发展,MEMS摩擦学已成为纳米摩擦学研究中最活跃的前沿领域之一。微观尺寸上的摩擦磨损和润滑对整个MEMS系统的性能、稳定性和寿命起着决定作用,因此研究MEMS的微观摩擦学性能至关重要。综述了近年来国内外MEMS摩擦学研究的新进展,介绍了MEMS系统的纳米摩擦学特性,包括环境条件、材料处理、表面改性、分子薄膜润滑等在解决MEMS摩擦和润滑问题上的研究状况,提出了当前相关研究的几个重要问题。
With the rapid development of micro-electromechanical systems (MEMS), MEMS tribology has become one of the most active frontiers in the research of nano-tribology. Frictional wear and lubrication at the microscopic dimensions play a decisive role in the performance, stability and lifetime of the MEMS system as a whole, and therefore it is important to investigate the microscopic tribological properties of MEMS. In this paper, the recent advances in tribological studies of MEMS at home and abroad are reviewed. The tribological properties of MEMS systems are introduced, including the research status of environmental conditions, material handling, surface modification and molecular film lubrication in solving MEMS friction and lubrication problems , Put forward several important issues related to the current research.