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采用真空阴极磁过滤电弧法(FCVA)沉积了不同厚度的类金刚石(DLC)薄膜,用波长为514.5nm的可见光拉曼光谱(Vis-Raman)和宽光谱变角度椭偏仪分析了薄膜的结构.实验结果表明,厚度影响DLC薄膜的结构.当DLC薄膜厚度从2nm增大到30nm时,Raman图谱中的G峰位置(G-pos)向高波数方向漂移,通过高斯拟合得出的D峰和G峰的强度比ID/IG减小,消光系数(Ks)逐渐减小,薄膜中的sp3键含量随厚度的增大而增大.当薄膜厚度从30nm增大到50nm时,ID/IG增大,Ks逐渐增大,薄膜中的sp3键含量减小.
DLC films with different thickness were deposited by vacuum cathodic magnetic filtration arc method (FCVA). The structures of the films were analyzed by visible-light Raman spectroscopy (514.5 nm) and wide-angle variable angle ellipsometry The experimental results show that the thickness affects the structure of DLC film.When the thickness of DLC film is increased from 2nm to 30nm, the G peak position (G-pos) in Raman spectrum shifts to the high wave number direction, and the D The intensity ratio ID / IG of peak and G peak decreases, while the extinction coefficient (Ks) decreases gradually, while the content of sp3 bond increases with the increase of thickness.When the film thickness increases from 30nm to 50nm, the ID / IG increased, Ks gradually increased, the sp3 bond content in the film decreases.