1.前言以前超晶格一词是用来表示晶体表面的晶格周期比原子的晶格周期大(主要是Cu、Zn等二元合金),而Esaki等人在提出超晶格器件方案的当时是用这个词来主要表示半导体领域的极薄膜周期构造(一层的厚度与原子的量子力学波长相同或比它还薄时)的。他主张用这种半导体超晶格结构制作各种高性能器件,而他的一部分研究成果已达 1. Introduction Previously, the term superlattice was used to indicate that the lattice period of the crystal surface was larger than that of the atomic lattice (mainly binary alloys such as Cu and Zn), while Esaki et al. At that time, the term was mainly used to indicate the extremely thin film periodic structure in the semiconductor field (the thickness of one layer is the same as or lower than the atomic quantum mechanical wavelength). He advocated the use of such semiconductor superlattice structure to produce a variety of high-performance devices, and some of his research results have reached