采用等离子增强化学气相淀积工艺(PECVD)制备出了Fe_2O_3薄膜。用X射线衍射(XRD)和扫描电子显微镜(SEM)分析了薄膜的结构、表面形貌和粒度。研究了薄膜对乙醇、液化石油气、煤气和氢气的敏感特性。结果表明所研制的薄膜对乙醇有较高灵敏度,其检测下限可达1ppm,而对液化石油气、煤气和氢气不太敏感,具有优良的选择性。 Fe_2O_3 thin films were prepared by plasma enhanced chemical vapor deposition (PECVD). The structure, surface morphology and particle size of the films were analyzed by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The sensitive properties of thin films to ethanol, liquefied petroleum gas, gas and hydrogen were studied. The results show that the developed thin film has higher sensitivity to ethanol, with the detection limit of up to 1ppm, less sensitive to liquefied petroleum gas, coal gas and hydrogen, and has excellent selectivity.