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介绍了厚膜集成微压传感器的研制过程。此种集成微压传感器的量程为１ ｋＰａ、满量程输出为２５ ｍＶ、非线性小于０ ．２ ％ 、综合精度小于０ ．５ ％ 。
The development of thick film integrated micro pressure sensor is introduced. This integrated micro-pressure sensor has a range of 1 kPa, a full-scale output of 25 mV and a non-linearity of less than zero. 2%, the overall accuracy is less than 0. 5%.