对类 Ｎｉ稀土 Ｘ 光激光波段衰减膜进行了设计，并根据设计结果，利用磁控溅射和旋转涂覆法分别制备了自支撑的 Ａｇ 衰减膜和聚苯乙烯（ Ｃ８ Ｈ８）衰减膜。利用真空 α能谱测厚仪和 αｓｔｅｐ１００ 台阶仪分别对衰减膜的质量厚度和均匀性进行了测量，用 Ａｕｇｅｒ 电子能谱（ Ａ Ｅ Ｓ）对 Ａｇ 衰减膜进行了表面杂质分析。 Based on the design results, a self-supporting Ag damping film and a polystyrene (C8 H8) damping film were prepared by magnetron sputtering and spin coating. The thickness and uniformity of the film were measured by vacuum α-spectrometer and αstep100 stepper, respectively. Surface impurities of Ag film were analyzed by Auger electron spectroscopy (AES).