一、前言十多年前，我们从美国LFE公司引进了一台铬版等离子刻蚀机，它采用的主要刻蚀气体是三氯乙烯。作为设备的一个附件，三氯乙烯罐装气体没有备品。若与国外联系采购，周期长且成本高，因此只能在国内想办法。经多方查找，在国内没能找到三氯乙烯气体源。看来，继续使用三 I. INTRODUCTION Ten years ago, we introduced a chromium plate plasma etching machine from the US company LFE. The main etching gas used is trichlorethylene. As an accessory to the equipment, there is no stock for trichlorethylene can gases. If you contact with foreign procurement, long cycle and high cost, it can only find a solution in the country. After multi-search, trichlorethylene gas source can not be found in China. It seems that continue to use three