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针对电寻址空间光调制器制作灰度掩模过程中,精缩透镜的低通滤波特性导致灰度掩模边缘锐度下降的问题,提出了掩模分形技术。对一幅高频灰阶掩模图形,按固定的或可变的低频采样。低频掩模的每个周期中,只包含原掩模图形多个周期中的一个抽样。通过实时掩模技术,将多个低频掩模按顺序曝光,从而恢复出原高频掩模图形。制作二元光栅时,分形掩模技术可使透镜造成的高频能量相对损失由35.23%降低至6.09%,同时,可将部分低频能量搬迁至中高频,较好地改善了灰阶掩模图形的边缘锐度。分形掩模还可以变多灰阶复杂掩模为简单的二元掩模,简化掩模的设计与实现,同时消除屏幕刷新率对掩模制作的影响。
Aiming at the problem that the low pass filter characteristic of the condensing lens decreases the sharpness of the edge of the gray mask in the process of making a gray mask for the electrical addressable spatial light modulator, a mask fractal technique is proposed. For a high-frequency grayscale mask pattern, sample at fixed or variable low frequency. Each cycle of the low frequency mask contains only one of the multiple cycles of the original mask pattern. Through the real-time mask technology, a plurality of low-frequency masks are sequentially exposed to recover the original high-frequency mask pattern. In the fabrication of binary grating, the fractal mask technology can reduce the relative loss of high-frequency energy caused by the lens from 35.23% to 6.09%, and at the same time, can relocate part of the low-frequency energy to medium- and high-frequency to better improve the grayscale mask pattern The sharpness of the edge. Fractal mask can also change the complex gray-scale mask as a simple binary mask, simplifying the mask design and implementation, while eliminating the screen refresh rate on the mask production.