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在一种已有的角位移干涉测量技术的基础上,提出一种改进的角位移测量方法.通过选择合适的初始入射角,使从平板前后表面反射的两光束实现剪切干涉.采用一维位置探测器测量光束经透镜会聚后在探测器光敏面上的光点偏移量.根据干涉信号的相位和光点偏移量可以计算出被测物体的角位移.在该测量方案中,引入的一平面反射镜与被测物体的反射面形成光程差放大系统,提高了角位移测量灵敏度.分析了初始入射角对剪切比的影响,并讨论了基于该方案的角位移测量精度.实验结果表明,基于该技术的角位移重复测量精度达到10-8rad数量级.
Based on the existing measurement technology of angular displacement interferometry, an improved method of angular displacement measurement is proposed, in which two beams reflected from the front and back of the slab can be sheared interference by choosing the proper initial incident angle. The position detector measures the light spot offset on the light-sensitive surface of the detector after the light beam is converged by the lens. Based on the phase and spot offset of the interference signal, the angular displacement of the measured object can be calculated. In this measurement plan, A plane mirror and the measured object reflection surface optical path difference amplification system to improve the sensitivity of angular displacement measurement.The influence of initial incident angle on shear ratio is analyzed and the accuracy of angular displacement measurement based on the scheme is discussed.Experiment The results show that the accuracy of angular displacement measurement based on this technique can reach 10-8rad.