论文部分内容阅读
在扫描电镜中，具有一定能量的电子束入射到被测样品上会产生很多信息。充分利用这些信息对于了解材料的结构及性能具有重要意义。静电式电子能量分析器是用于半导体材料及微电子器件分层体视及内窥的一种扫描电镜上的新型检测器。在此介绍了电子能量分析器的设计原理及能量分辨率的计算方法，并用计算机对电子能量分析器进行了辅助设计。软件用ＶｉｓｕａｌＢａｓｉｃ编写，界面友好，操作方便，可同时显示数值计算结果、电极形状及电子轨迹模拟结果，具有快速、准确、直观的优点。还给出一个用该软件设计的实例结果。
In SEM, a certain amount of energy of the electron beam incident on the measured sample will produce a lot of information. Making the most of this information is of great importance for understanding the structure and properties of materials. Electrostatic electronic energy analyzer is used for semiconductor materials and microelectronic devices layered stereo and endoscopic scanning electron microscope on a new type of detector. In this paper, the design principle of electronic energy analyzer and the calculation method of energy resolution are introduced. And computer assisted electronic energy analyzer is designed. Software written in VisualBasic, friendly interface, easy to operate, can display numerical results, electrode shape and electronic trajectory simulation results, with the advantages of fast, accurate and intuitive. Also gives an example of the results of the software design.