数字微镜器件(DMD)可以控制其中每个微镜的偏转状态,相对于其他光分束器件,它可以构建出点光源大小可变、间距可调的柔性阵列光源。在前期研究的基础上,理论上推导出该阵列光源可以用于并行共焦测量,改进了测量光路,并结合实际使用找到了合适的阵列光源参数,获知了并行共焦测量系统的纵向分辨率与点光源大小的关系,最终通过对实物的测量较完善地阐述了基于DMD的并行共焦测量系统。 The digital micromirror device (DMD) controls the deflection state of each of the micromirrors. Compared with other optical beam splitters, the DMD can construct a flexible array light source with a variable point pitch and a variable pitch. Based on the previous studies, it is deduced theoretically that the array light source can be used for parallel confocal measurement, and the measurement optical path is improved. Based on the actual use, the suitable parameters of the array light source are found, and the longitudinal resolution of the parallel confocal measurement system And the relationship between the size of the point light source, and finally through the measurement of the physical better elaborate DMD-based parallel confocal measurement system.