微机械电子系统（有人称微机械或微系统，或微电子机械系统）是指用微机械加工技术制作的包括微传感器、微执行器、微能源等微机械基本部分以及高性能的电子集成线路组成的微机电器件与装置。以微机械为研究对象的微机电系统（或工程）涉及多种学科，主要有微机械学、微电子学? Micromachined electronic systems (some say micromachines or microsystems, or microelectromechanical systems) are micromachined micromachines, micromachines, micromachines and other micromachines that are fabricated using micromachining techniques, as well as high performance electronic integrated circuits Composed of MEMS devices and devices. Micro-electromechanical systems (or projects) that are subject to micro-mechanical research involve a variety of disciplines, including micro-mechanics and microelectronics.