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本文通过共振核反应与红外吸收两种实验方法,对用PECVD法淀积的非晶碳膜中氢原子在不同剂量电子辐照下的行为,进行了深入的研究.不同剂量的电子辐照,使碳膜样品中的氢含量大小及氢原子的存在方式等有不同程度的变化.
In this paper, by the resonance nuclear reaction and infrared absorption two experimental methods, the PECVD deposited amorphous carbon film hydrogen atoms under different doses of electron irradiation conducted an in-depth study of different doses of electron irradiation, so that Carbon samples in the hydrogen content and the presence of hydrogen atoms have varying degrees of change.